ROSi600 Trace Oxygen by Inert Gas Fusion Infrared Detection for Silicon

Oxygen
LECO ROSi600 - Trace Oxygen by Inert Gas Fusion Infrared Detection for Silicon

SILICON WAFER LOADING

Exclusively designed loading head eliminates atmospheric blank

User friendly interface

ROsi600-screen

sample information, results, statistics on the same screen

Description

The ROSi600 was designed to meet the low level sensitivity and high precision demands of the silicon industry. By combining the unmatched sensitivity of our solid-state infrared detection system with our novel sample loading system and programmable impulse furnace, the ROSi600 provide accurate and precise oxygen results in materials such as silicon wafers. The low level sensitivity and high precision has also been applied to the metals industry, determining the oxygen content in high purity copper for the electronics industry.

Benefits:LECO ROSi600 - Trace Oxygen by Inert Gas Fusion Infrared Detection for Silicon

  • Dedicated analyser for trace oxygen
  • Enhanced accuracy and precision to low-ppm levels
  • Resolution to 0.001 ppm
  • Oxygen output in ppma
  • Advanced design of wafer friendly loading head
  • Safety protected reagent train
  • Reduced maintenance with improved gas transfer

Operation

The sample loading head is designed for consistent sample loading, low atmospheric blank and high carrier gas purity.
Silicon wafers are consistently loaded into the furnace with the chute design of the loading head. Dual seals, a magnetic loading mechanism and integrated oxygen/moisture scrubber promote a near-zero atmospheric blank and maintain optimal carrier gas purity.

Features:

  • Low level, high precision solid-state infrared (IR) detection
  • Electrode Impulse Furnace with power or current control
  • Low system blanks due to specially designed loading head
  • Reduced maintenance with improved gas transfer
  • Windows® -based operating system
  • User interface incorporates sample information, sample results, statistics, and system controls

Options & models

Options

Various options are available for this product. Contact our sales and application specialists to select the right configuration for your application.

Smartline Remote Diagnostics

LECO's convenient internet-based SmartLine Remote Diagnostics system provides you with our fastest service solution —saving you time and money.

Auto Cleaner/Batch Loader

Increases throughput and automates the workflow

Models

Each instrument can be configured to meet your individual lab needs. Contact our sales and application specialists to select the right configuration for your application.

ROSi600 Trace Oxygen Analyzer

with Windows–based operating software, PC and flat panel display

Documentation

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